- 產(chǎn)品用途:Product Applications
●渦輪分子泵用于高真空和超高真空,它不能直接對(duì)大氣排氣,需要配置前級(jí)泵。
主要應(yīng)用領(lǐng)域:Main applications:
●表面物理和分析儀器
●等離子體物理,空間研究
●核聚變裝置
●原子束分子束系統(tǒng),粒子加速器
●真空鍍膜
●真空冶煉
●半導(dǎo)體和光學(xué)器件制造
產(chǎn)品特點(diǎn):Product Features
●體積小,安裝和使用方便
●理想的動(dòng)平衡,震動(dòng)和噪音小
●壓力在10-1~10-8pa范圍內(nèi)有恒定的抽速
●陶瓷軸承使用壽命長(zhǎng)
F型渦輪分子泵
Model F Vertical Turbomolecular Pump
技術(shù)參數(shù)Technical specifications:
Model F Vertical Turbomolecular Pump
技術(shù)參數(shù)Technical specifications:
型號(hào) Model | FC-150/450 | FG-150/450 | FC-250/1400 | FG-250/1400 | F-400B/3500 | |
進(jìn)氣口法蘭 Inlet flange (mm) | DN160CF | DN160LF | DN250CF | DN250LF | DN400LF | |
出氣口法蘭 Oulet flange (mm) | DN40KF | DN63LF | DN100LF | |||
抽氣速度 Pumping speed (L/S) | 450 | 1400 | 3500 | |||
極限壓力 Ultimate pressure | 不烘烤 Without baking (Pa) | 6×10-6 | 6×10-6 | 6×10-6 | ||
壓縮比 Compression ratio | 對(duì)N2 | 108 | 108 | 108 | ||
對(duì)H2 | 102 | 102 | 102 | |||
轉(zhuǎn)速RPM (r/min) | 24000 | 24000 | 14100 | |||
起動(dòng)時(shí)間 Start-up time <(Min) | 5 | 10 | 20 | |||
前級(jí)壓力 Fore pressure <(Pa) | 10 | 10 | 10 | |||
建議采用的前級(jí)泵 Recommended backing pump (L/s) | 8 | 15 | 30 | |||
冷卻水溫度 Cooling water temperature <(℃) | ≤25 | ≤25 | ≤25 | |||
冷卻水壓力 Cooling water pressure (Mpa) | 0.196 | 0.196 | 0.196 | |||
泵體烘烤溫度 Temperature of baking <(℃) | 120 | 120 | 120 | |||
重量 Weight(Kg) | 35 | 70 | 125 |